Sub-300 Å (Bax,Sr1-x)TiO3 films by metal organic chemical vapor deposition: Nanostructure, step coverage, and dielectric properties

Sandwip Dey, Prashant Majhi, Yong W. Shin, Derek Tang, Aaron Kirby, Jun Zhao, Charles Dornfest, Lee Lou, Shreyas Kher

Research output: Contribution to journalArticlepeer-review

6 Scopus citations

Fingerprint

Dive into the research topics of 'Sub-300 Å (Bax,Sr1-x)TiO3 films by metal organic chemical vapor deposition: Nanostructure, step coverage, and dielectric properties'. Together they form a unique fingerprint.

Engineering

Material Science

Chemical Engineering

Keyphrases