Strain characterization of strained silicon on insulator including the effects of rotational misalignment

Yeongseok Zoo, N. D. Theodore, Terry Alford

Research output: Contribution to journalArticlepeer-review

3 Scopus citations

Fingerprint

Dive into the research topics of 'Strain characterization of strained silicon on insulator including the effects of rotational misalignment'. Together they form a unique fingerprint.

Keyphrases

Engineering