Silicon layer transfer using plasma hydrogenation
- Peng Chen
- , S. S. Lau
- , Paul K. Chu
- , K. Henttinen
- , T. Suni
- , I. Suni
- , N. David Theodore
- , Terry Alford
- , J. W. Mayer
- , Lin Shao
- , M. Nastasi
Research output: Contribution to journal › Article › peer-review
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