Abstract
This paper proposes a formulation for optimizing long-term production and machine allocation for semiconductor fabrication facilities. Specifically, the concept of Model Predictive Control (MPC) is extended to the scheduling of reentrant manufacturing lines commonly seen in semiconductor manufacturing problems. A state space formulation of MPC is used to obtain this `combined' long-term scheduler and controller system. An l 1-norm finite moving horizon cost function is used to obtain a control law which is implemented as a linear programming problem (LP).
| Original language | English (US) |
|---|---|
| Title of host publication | Proceedings of the American Control Conference |
| Publisher | IEEE |
| Pages | 1919-1923 |
| Number of pages | 5 |
| Volume | 3 |
| State | Published - 1997 |
| Event | Proceedings of the 1997 American Control Conference. Part 3 (of 6) - Albuquerque, NM, USA Duration: Jun 4 1997 → Jun 6 1997 |
Other
| Other | Proceedings of the 1997 American Control Conference. Part 3 (of 6) |
|---|---|
| City | Albuquerque, NM, USA |
| Period | 6/4/97 → 6/6/97 |
ASJC Scopus subject areas
- Control and Systems Engineering