Keyphrases
Nanoimprint
100%
Nanoimprint Lithography
100%
Multilayer Metasurface
100%
Metasurface
80%
Polarimetric Imaging
40%
High-resolution
20%
Fabrication Methods
20%
Nanofabrication
20%
Scalable Fabrication
20%
Structural Complexity
20%
CMOS Imagers
20%
Fundamental Limitations
20%
Surface Roughness
20%
Circular Polarization
20%
Nanometer Scale
20%
Electron Beam
20%
Transferability
20%
Electronic Devices
20%
Functional Structure
20%
Ultra-compact
20%
Optics
20%
Imaging Device
20%
Parameter Analysis
20%
Optical Devices
20%
Micro-sized
20%
Integrated chip
20%
Visible Spectrum
20%
Photonic Structures
20%
3D Pattern
20%
Quantum Devices
20%
Subwavelength Scale
20%
Optical Metasurfaces
20%
Pattern Transfer
20%
Meta-atom
20%
Lithography Process
20%
Alignment Error
20%
Integrated CMOS
20%
Blue Wavelength
20%
Red Wavelength
20%
Rotational Alignment
20%
Full-Stokes Parameters
20%
Metasurface Structure
20%
Compact Optic
20%
Polarization Extinction Ratio
20%
Area Functional
20%
Overlay Accuracy
20%
Material Science
Lithography
100%
Silicon
50%
Aluminum
50%
Surface Roughness
25%
Linewidth
25%
Quantum Device
25%
Physics
Metasurface
100%
Optics
25%
High Resolution
12%
Photonics
12%
Broadband
12%
Linewidth
12%
Quantum Device
12%
Nanomanufacturing System
12%
Surface Roughness
12%
Electron Beam
12%