TY - GEN
T1 - Resistive switching random access memory - Materials, device, interconnects, and scaling considerations
AU - Wu, Yi
AU - Liang, Jiale
AU - Yu, Shimeng
AU - Guan, Ximeng
AU - Wong, H. S.Philip
N1 - Copyright:
Copyright 2013 Elsevier B.V., All rights reserved.
PY - 2012
Y1 - 2012
N2 - In this paper, we review recent progresses on metal oxide resistive switching memory (RRAM). RRAM device design is explored from different aspects including oxide/electrode materials, uniformity issues, and scaling down to single-digit-nm regime. We studied the stochastic nature of resistive switching in metal oxide RRAM and revealed the physics behind switching parameter variations in HfOx-based RRAM using a 2D analytical solver. In a forward-looking analysis into the sub-10 nm regime, we investigated the impact of wordline/bitline metal wire scaling on the read/write performance, energy consumption in the cross-point memory array architecture.
AB - In this paper, we review recent progresses on metal oxide resistive switching memory (RRAM). RRAM device design is explored from different aspects including oxide/electrode materials, uniformity issues, and scaling down to single-digit-nm regime. We studied the stochastic nature of resistive switching in metal oxide RRAM and revealed the physics behind switching parameter variations in HfOx-based RRAM using a 2D analytical solver. In a forward-looking analysis into the sub-10 nm regime, we investigated the impact of wordline/bitline metal wire scaling on the read/write performance, energy consumption in the cross-point memory array architecture.
UR - http://www.scopus.com/inward/record.url?scp=84875106630&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84875106630&partnerID=8YFLogxK
U2 - 10.1109/IIRW.2012.6468906
DO - 10.1109/IIRW.2012.6468906
M3 - Conference contribution
AN - SCOPUS:84875106630
SN - 9781467327527
T3 - IEEE International Integrated Reliability Workshop Final Report
SP - 16
EP - 21
BT - 2012 IEEE International Integrated Reliability Workshop Final Report, IIRW 2012
T2 - 2012 IEEE International Integrated Reliability Workshop, IIRW 2012
Y2 - 14 October 2012 through 18 October 2012
ER -