TY - GEN
T1 - Repeatability performance of non-contact probes in the 500-750GHz band
AU - Caglayan, Cosan
AU - Trichopoulos, Georgios C.
AU - Sertel, Kubilay
N1 - Publisher Copyright:
© 2015 IEEE.
PY - 2015/7/17
Y1 - 2015/7/17
N2 - We present the repeatability performance of an automated non-contact probe system for on-wafer device and integrated circuit characterization in the 500-750 GHz band. Unlike conventional contact-probe systems, a computer controlled x-y translation stage is employed to realize a completely automated non-contact probe setup. Thanks to this simplicity, far superior repeatability performance can be achieved with great ease. We present the repeatability study specifically for the 500-750 GHz band utilizing a precision servo system with 1 micron translation accuracy. At 625 GHz, our setup achieves 2.2° deviation in phase and 4.4% deviation in magnitude for 25 successive measurements spanning over 1.5 hours. This fully computerized non-contact probe system also facilitates intermittent re-calibrations that are normally needed for reliable sub-mmW measurements.
AB - We present the repeatability performance of an automated non-contact probe system for on-wafer device and integrated circuit characterization in the 500-750 GHz band. Unlike conventional contact-probe systems, a computer controlled x-y translation stage is employed to realize a completely automated non-contact probe setup. Thanks to this simplicity, far superior repeatability performance can be achieved with great ease. We present the repeatability study specifically for the 500-750 GHz band utilizing a precision servo system with 1 micron translation accuracy. At 625 GHz, our setup achieves 2.2° deviation in phase and 4.4% deviation in magnitude for 25 successive measurements spanning over 1.5 hours. This fully computerized non-contact probe system also facilitates intermittent re-calibrations that are normally needed for reliable sub-mmW measurements.
UR - http://www.scopus.com/inward/record.url?scp=84948402902&partnerID=8YFLogxK
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U2 - 10.1109/ARFTG.2015.7162909
DO - 10.1109/ARFTG.2015.7162909
M3 - Conference contribution
AN - SCOPUS:84948402902
T3 - 85th ARFTG Microwave Measurement Conference: Measurements and Techniques for 5G Applications, ARFTG 2015
BT - 85th ARFTG Microwave Measurement Conference
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 85th ARFTG Microwave Measurement Conference, ARFTG 2015
Y2 - 22 May 2015
ER -