Remote polar phonon scattering in Si inversion layers

B. T. Moore, D. K. Ferry

Research output: Contribution to journalArticlepeer-review

49 Scopus citations


The effects upon the drift velocity and electron temperatures in silicon inversion layers due to interfacial polar-mode phonons in the Si/SiO2 interface have been calculated at various temperatures. These calculations were carried out at 77, 150, and 300 K using a three-energy-level model for transport in the quasi-two-dimensional inversion layer assuming a drifted-Maxwellian distribution. The effects of the polar interface phonon scattering are compared to the effects of scattering due to Si bulk phonons, interface charges, and interface roughness. The effects of the remote phonons are found to be small in the drift velocity, but are significant as an energy relaxation mechanism at high fields and large inversion densities.

Original languageEnglish (US)
Pages (from-to)2603-2605
Number of pages3
JournalJournal of Applied Physics
Issue number5
StatePublished - 1980
Externally publishedYes

ASJC Scopus subject areas

  • General Physics and Astronomy


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