Real-time observation of aluminum chemical vapor deposition in an environmental scanning electron microscope

Medicine & Life Sciences

• Chemical Evolution 100%
• Aluminum 60%
• Heating 56%
• Electron Scanning Microscopy 51%
• Industry 48%
• Metals 45%
• Gases 44%
• Electrons 42%
• Observation 37%

Engineering & Materials Science

• Chemical vapor deposition 61%
• Organometallics 53%
• Electron microscopes 49%
• Aluminum 40%
• Scanning 40%
• Microstructural evolution 21%
• Microelectronics 18%
• Scanning electron microscopy 13%
• Imaging techniques 13%
• Heating 12%
• Metals 11%
• Gases 10%
• Industry 7%
• Experiments 6%

Physics & Astronomy

• electron microscopes 41%
• vapor deposition 40%
• aluminum 36%
• scanning 33%
• metal films 18%
• microelectronics 17%
• industries 14%
• scanning electron microscopy 11%
• heating 11%
• gases 9%