RAMAN SPECTROSCOPIC EVALUATION OF SILICIDES FORMED WITH A SCANNED ELECTRON BEAM.

R. J. Nemanich, T. W. Sigmon, N. M. Johnson, M. D. Moyer, S. S. Lau

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English (US)
Title of host publication	Materials Research Society Symposia Proceedings
Pages	541-546
Number of pages	6
State	Published - 1981
Externally published	Yes

Name	Materials Research Society Symposia Proceedings
Volume	1

ASJC Scopus subject areas

@inproceedings{54e50d5813dc4f82a15f189618ac0067,

title = "RAMAN SPECTROSCOPIC EVALUATION OF SILICIDES FORMED WITH A SCANNED ELECTRON BEAM.",

author = "Nemanich, {R. J.} and Sigmon, {T. W.} and Johnson, {N. M.} and Moyer, {M. D.} and Lau, {S. S.}",

year = "1981",

language = "English (US)",

isbn = "0444005951",

series = "Materials Research Society Symposia Proceedings",

pages = "541--546",

booktitle = "Materials Research Society Symposia Proceedings",

}

TY - GEN

T1 - RAMAN SPECTROSCOPIC EVALUATION OF SILICIDES FORMED WITH A SCANNED ELECTRON BEAM.

AU - Nemanich, R. J.

AU - Sigmon, T. W.

AU - Johnson, N. M.

AU - Moyer, M. D.

AU - Lau, S. S.

PY - 1981

Y1 - 1981

UR - http://www.scopus.com/inward/record.url?scp=0019666668&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0019666668&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:0019666668

SN - 0444005951

T3 - Materials Research Society Symposia Proceedings

SP - 541

EP - 546

BT - Materials Research Society Symposia Proceedings

ER -