Raman scattering of tetrahedrally-bonded amorphous carbon deposited at oblique angles

Minseo Park; S. M. Camphausen; A. F. Myers; P. T. Barletta; V. Sakhrani; L. Bergman; R. J. Nemanich; Jerome J. Cuomo

doi:10.1016/S0167-577X(99)00135-4

Raman scattering of tetrahedrally-bonded amorphous carbon deposited at oblique angles

Minseo Park
, S. M. Camphausen
, A. F. Myers
, P. T. Barletta
, V. Sakhrani
, L. Bergman
, R. J. Nemanich
, Jerome J. Cuomo

Research output: Contribution to journal › Article › peer-review

8 Scopus citations

Abstract

Amorphous carbon (t_xa-C_1-x) films were prepped by filtered cathodic arc deposition (FCAD). The films were deposited on p-type Si (111). The angle of beam incidence was varied from 0° to 75° with respect to the substrate normal. Micro-Raman spectroscopy, electron energy loss spectroscopy (EELS), and transmission electron microscopy (TEM) were carried out for sample analysis. It was found that the position of the G peak shifts to a higher wave number region as the angle of incidence increases. This means that the sp²/sp³ ratio increases with increasing angle. This conclusion is supported by EELS. The film deposited at an angle of 75° exhibits a columnar structure with alternating high and low carbon density regions.

Original language	English (US)
Pages (from-to)	229-233
Number of pages	5
Journal	Materials Letters
Volume	41
Issue number	5
DOIs	https://doi.org/10.1016/S0167-577X(99)00135-4
State	Published - Dec 1999
Externally published	Yes

ASJC Scopus subject areas

General Materials Science
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

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10.1016/S0167-577X(99)00135-4

Cite this

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title = "Raman scattering of tetrahedrally-bonded amorphous carbon deposited at oblique angles",

abstract = "Amorphous carbon (txa-C1-x) films were prepped by filtered cathodic arc deposition (FCAD). The films were deposited on p-type Si (111). The angle of beam incidence was varied from 0° to 75° with respect to the substrate normal. Micro-Raman spectroscopy, electron energy loss spectroscopy (EELS), and transmission electron microscopy (TEM) were carried out for sample analysis. It was found that the position of the G peak shifts to a higher wave number region as the angle of incidence increases. This means that the sp2/sp3 ratio increases with increasing angle. This conclusion is supported by EELS. The film deposited at an angle of 75° exhibits a columnar structure with alternating high and low carbon density regions.",

author = "Minseo Park and Camphausen, \{S. M.\} and Myers, \{A. F.\} and Barletta, \{P. T.\} and V. Sakhrani and L. Bergman and Nemanich, \{R. J.\} and Cuomo, \{Jerome J.\}",

year = "1999",

month = dec,

doi = "10.1016/S0167-577X(99)00135-4",

language = "English (US)",

volume = "41",

pages = "229--233",

journal = "Materials Letters",

issn = "0167-577X",

publisher = "Elsevier B.V.",

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}

TY - JOUR

T1 - Raman scattering of tetrahedrally-bonded amorphous carbon deposited at oblique angles

AU - Park, Minseo

AU - Camphausen, S. M.

AU - Myers, A. F.

AU - Barletta, P. T.

AU - Sakhrani, V.

AU - Bergman, L.

AU - Nemanich, R. J.

AU - Cuomo, Jerome J.

PY - 1999/12

Y1 - 1999/12

N2 - Amorphous carbon (txa-C1-x) films were prepped by filtered cathodic arc deposition (FCAD). The films were deposited on p-type Si (111). The angle of beam incidence was varied from 0° to 75° with respect to the substrate normal. Micro-Raman spectroscopy, electron energy loss spectroscopy (EELS), and transmission electron microscopy (TEM) were carried out for sample analysis. It was found that the position of the G peak shifts to a higher wave number region as the angle of incidence increases. This means that the sp2/sp3 ratio increases with increasing angle. This conclusion is supported by EELS. The film deposited at an angle of 75° exhibits a columnar structure with alternating high and low carbon density regions.

AB - Amorphous carbon (txa-C1-x) films were prepped by filtered cathodic arc deposition (FCAD). The films were deposited on p-type Si (111). The angle of beam incidence was varied from 0° to 75° with respect to the substrate normal. Micro-Raman spectroscopy, electron energy loss spectroscopy (EELS), and transmission electron microscopy (TEM) were carried out for sample analysis. It was found that the position of the G peak shifts to a higher wave number region as the angle of incidence increases. This means that the sp2/sp3 ratio increases with increasing angle. This conclusion is supported by EELS. The film deposited at an angle of 75° exhibits a columnar structure with alternating high and low carbon density regions.

UR - https://www.scopus.com/pages/publications/0033330471

UR - https://www.scopus.com/pages/publications/0033330471#tab=citedBy

U2 - 10.1016/S0167-577X(99)00135-4

DO - 10.1016/S0167-577X(99)00135-4

M3 - Article

AN - SCOPUS:0033330471

SN - 0167-577X

VL - 41

SP - 229

EP - 233

JO - Materials Letters

JF - Materials Letters

IS - 5

ER -

Raman scattering of tetrahedrally-bonded amorphous carbon deposited at oblique angles

Abstract

ASJC Scopus subject areas

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