Raman scattering from microcrystalline Si films: Considerations of composite structures with different optical absorption properties

R. J. Nemanich; E. C. Buehler; Y. M. Legrice; R. E. Shroder; G. N. Parsons; C. Wang; C. Lucovsky; J. B. Boyce

doi:10.1016/0022-3093(89)90729-1

Raman scattering from microcrystalline Si films: Considerations of composite structures with different optical absorption properties

R. J. Nemanich, E. C. Buehler, Y. M. Legrice, R. E. Shroder, G. N. Parsons, C. Wang, C. Lucovsky, J. B. Boyce

Research output: Contribution to journal › Article › peer-review

15 Scopus citations

Abstract

Raman scattering measurements are used to characterize the amorphous and crystalline components of microcrystalline Si films. A model is described which addresses the properties of Raman scattering from composites of materials of different optical absorption. The analysis shows that the observed spectra is dependent on both the percentage of the components and on the domain size of the more highly absorbing domains. Samples of microcrystalline silicon prepared by excimer laser exposure of hydrogenated a-Si and by magnetron sputtering were measured, and the results were analyzed in terms of the model. The experimental results reflect the length scales of the domains and vibrational excitations.

Original language	English (US)
Pages (from-to)	813-815
Number of pages	3
Journal	Journal of Non-Crystalline Solids
Volume	114
Issue number	PART 2
DOIs	https://doi.org/10.1016/0022-3093(89)90729-1
State	Published - Dec 2 1989
Externally published	Yes

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Ceramics and Composites
Condensed Matter Physics
Materials Chemistry

Access to Document

10.1016/0022-3093(89)90729-1

Cite this

@article{e7488562e6984065837b6ffbd89af8c7,

title = "Raman scattering from microcrystalline Si films: Considerations of composite structures with different optical absorption properties",

abstract = "Raman scattering measurements are used to characterize the amorphous and crystalline components of microcrystalline Si films. A model is described which addresses the properties of Raman scattering from composites of materials of different optical absorption. The analysis shows that the observed spectra is dependent on both the percentage of the components and on the domain size of the more highly absorbing domains. Samples of microcrystalline silicon prepared by excimer laser exposure of hydrogenated a-Si and by magnetron sputtering were measured, and the results were analyzed in terms of the model. The experimental results reflect the length scales of the domains and vibrational excitations.",

author = "Nemanich, {R. J.} and Buehler, {E. C.} and Legrice, {Y. M.} and Shroder, {R. E.} and Parsons, {G. N.} and C. Wang and C. Lucovsky and Boyce, {J. B.}",

year = "1989",

month = dec,

day = "2",

doi = "10.1016/0022-3093(89)90729-1",

language = "English (US)",

volume = "114",

pages = "813--815",

journal = "Journal of Non-Crystalline Solids",

issn = "0022-3093",

publisher = "Elsevier",

number = "PART 2",

}

TY - JOUR

T1 - Raman scattering from microcrystalline Si films

T2 - Considerations of composite structures with different optical absorption properties

AU - Nemanich, R. J.

AU - Buehler, E. C.

AU - Legrice, Y. M.

AU - Shroder, R. E.

AU - Parsons, G. N.

AU - Wang, C.

AU - Lucovsky, C.

AU - Boyce, J. B.

PY - 1989/12/2

Y1 - 1989/12/2

N2 - Raman scattering measurements are used to characterize the amorphous and crystalline components of microcrystalline Si films. A model is described which addresses the properties of Raman scattering from composites of materials of different optical absorption. The analysis shows that the observed spectra is dependent on both the percentage of the components and on the domain size of the more highly absorbing domains. Samples of microcrystalline silicon prepared by excimer laser exposure of hydrogenated a-Si and by magnetron sputtering were measured, and the results were analyzed in terms of the model. The experimental results reflect the length scales of the domains and vibrational excitations.

AB - Raman scattering measurements are used to characterize the amorphous and crystalline components of microcrystalline Si films. A model is described which addresses the properties of Raman scattering from composites of materials of different optical absorption. The analysis shows that the observed spectra is dependent on both the percentage of the components and on the domain size of the more highly absorbing domains. Samples of microcrystalline silicon prepared by excimer laser exposure of hydrogenated a-Si and by magnetron sputtering were measured, and the results were analyzed in terms of the model. The experimental results reflect the length scales of the domains and vibrational excitations.

UR - http://www.scopus.com/inward/record.url?scp=0024807723&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0024807723&partnerID=8YFLogxK

U2 - 10.1016/0022-3093(89)90729-1

DO - 10.1016/0022-3093(89)90729-1

M3 - Article

AN - SCOPUS:0024807723

SN - 0022-3093

VL - 114

SP - 813

EP - 815

JO - Journal of Non-Crystalline Solids

JF - Journal of Non-Crystalline Solids

IS - PART 2

ER -

Raman scattering from microcrystalline Si films: Considerations of composite structures with different optical absorption properties

Abstract

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this