Plasma hydrogenation of strained Si/SiGe/Si heterostructure for layer transfer without ion implantation

  • Lin Shao
  • , Yuan Lin
  • , J. K. Lee
  • , Q. X. Jia
  • , Yongqiang Wang
  • , M. Nastasi
  • , Phillip E. Thompson
  • , N. David Theodore
  • , Paul K. Chu
  • , Terry Alford
  • , J. W. Mayer
  • , Peng Chen
  • , S. S. Lau

Research output: Contribution to journal › Article › peer-review

41 Scopus citations

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Material Science