Plasma hydrogenation of strained Si/SiGe/Si heterostructure for layer transfer without ion implantation

Lin Shao, Yuan Lin, J. K. Lee, Q. X. Jia, Yongqiang Wang, M. Nastasi, Phillip E. Thompson, N. David Theodore, Paul K. Chu, Terry Alford, J. W. Mayer, Peng Chen, S. S. Lau

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Physics & Astronomy