Piezoelectric microelectromechanical resonant sensors for chemical and biological detection

Wei Pang, Hongyuan Zhao, Eun Sok Kim, Hao Zhang, Hongyu Yu, Xiaotang Hu

Research output: Contribution to journalReview articlepeer-review

174 Scopus citations


Piezoelectric microelectromechanical systems (MEMS) resonant sensors, known for their excellent mass resolution, have been studied for many applications, including DNA hybridization, protein-ligand interactions, and immunosensor development. They have also been explored for detecting antigens, organic gas, toxic ions, and explosives. Most piezoelectric MEMS resonant sensors are acoustic sensors (with specific coating layers) that enable selective and label-free detection of biological events in real time. These label-free technologies have recently garnered significant attention for their sensitive and quantitative multi-parameter analysis of biological systems. Since piezoelectric MEMS resonant sensors do more than transform analyte mass or thickness into an electrical signal (e.g., frequency and impedance), special attention must be paid to their potential beyond microweighing, such as measuring elastic and viscous properties, and several types of sensors currently under development operate at different resonant modes (i.e., thickness extensional mode, thickness shear mode, lateral extensional mode, flexural mode, etc.). In this review, we provide an overview of recent developments in micromachined resonant sensors and activities relating to biochemical interfaces for acoustic sensors.

Original languageEnglish (US)
Pages (from-to)29-44
Number of pages16
JournalLab on a Chip
Issue number1
StatePublished - Jan 7 2012

ASJC Scopus subject areas

  • Bioengineering
  • Biochemistry
  • General Chemistry
  • Biomedical Engineering


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