Piezoelectric measurements with atomic force microscopy

J. A. Christman, R. R. Woolcott, A. I. Kingon, R. J. Nemanich

Research output: Contribution to journalArticlepeer-review

266 Scopus citations


An atomic force microscope (AFM) is used to measure the magnitude of the effective longitudinal piezoelectric constant (d33) of thin films. Measurements are performed with a conducting diamond AFM tip in contact with a top electrode. The interaction between the tip and electric field present is a potentially large source of error that is eliminated through the use of this configuration and the conducting diamond tips. Measurements yielded reasonable piezoelectric constants of X-cut single-crystal quartz, thin film ZnO, and nonpiezoelectric SiO2 thin films.

Original languageEnglish (US)
Pages (from-to)3851-3853
Number of pages3
JournalApplied Physics Letters
Issue number26
StatePublished - 1998
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)


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