Piezoelectric measurements with atomic force microscopy

J. A. Christman; R. R. Woolcott; A. I. Kingon; R. J. Nemanich

doi:10.1063/1.122914

Piezoelectric measurements with atomic force microscopy

J. A. Christman, R. R. Woolcott, A. I. Kingon, R. J. Nemanich

Research output: Contribution to journal › Article › peer-review

266 Scopus citations

Abstract

An atomic force microscope (AFM) is used to measure the magnitude of the effective longitudinal piezoelectric constant (d₃₃) of thin films. Measurements are performed with a conducting diamond AFM tip in contact with a top electrode. The interaction between the tip and electric field present is a potentially large source of error that is eliminated through the use of this configuration and the conducting diamond tips. Measurements yielded reasonable piezoelectric constants of X-cut single-crystal quartz, thin film ZnO, and nonpiezoelectric SiO₂ thin films.

Original language	English (US)
Pages (from-to)	3851-3853
Number of pages	3
Journal	Applied Physics Letters
Volume	73
Issue number	26
DOIs	https://doi.org/10.1063/1.122914
State	Published - 1998
Externally published	Yes

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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title = "Piezoelectric measurements with atomic force microscopy",

abstract = "An atomic force microscope (AFM) is used to measure the magnitude of the effective longitudinal piezoelectric constant (d33) of thin films. Measurements are performed with a conducting diamond AFM tip in contact with a top electrode. The interaction between the tip and electric field present is a potentially large source of error that is eliminated through the use of this configuration and the conducting diamond tips. Measurements yielded reasonable piezoelectric constants of X-cut single-crystal quartz, thin film ZnO, and nonpiezoelectric SiO2 thin films.",

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year = "1998",

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AU - Woolcott, R. R.

AU - Kingon, A. I.

AU - Nemanich, R. J.

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Y1 - 1998

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Piezoelectric measurements with atomic force microscopy

Abstract

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