Piezoelectric measurements with atomic force microscopy

J. A. Christman, H. Maiwa, S. H. Kim, A. I. Kingon, Robert Nemanich

Research output: Chapter in Book/Report/Conference proceedingChapter

17 Scopus citations


An atomic force microscope (AFM) is used to measure the magnitude of the effective longitudinal piezoelectric constant (d 33) of thin films. Measurements are performed with a conducting diamond AFM tip in contact with a top electrode which is driven by an externally applied voltage. The interaction between the tip and electric field present is potentially large source of error that is eliminated through the use of this configuration and the conducting diamond tips. Measurements yielded reasonable piezoelectric constants of X-cut single crystal quartz, thin film ZnO, Pb(Zr,Ti)O 3 (Zr/Ti = 30/70), and nonpiezoelectric amorphous SiO 2 thin films. The system was also used to measure d 33 hysteresis loops for Pb(Zr x, Ti 1-x)O 3 thin films.

Original languageEnglish (US)
Title of host publicationMaterials Research Society Symposium - Proceedings
PublisherMaterials Research Society
Number of pages6
StatePublished - 1999
Externally publishedYes
EventProceedings of the 1998 MRS Fall Meeting - The Symposium 'Advanced Catalytic Materials-1998' - Boston, MA, USA
Duration: Nov 30 1998Dec 3 1998


OtherProceedings of the 1998 MRS Fall Meeting - The Symposium 'Advanced Catalytic Materials-1998'
CityBoston, MA, USA

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials


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