Photochemical template removal and spatial patterning of zeolite MFI thin films using UV/ozone treatment

Qinghua Li, Meri L. Amweg, Chanel K. Yee, Alexandra Navrotsky, Atul N. Parikh

Research output: Contribution to journalArticlepeer-review

31 Scopus citations


This paper describes an application of a non-thermal, photochemical calcination process for an efficient and spatially controlled removal of the organic structure-directing agent in the preparation of thin films of microporous or zeolite materials. We prepared thin-films of a high silica zeolite (structure code: MFI) following a previously published procedure. The films were illuminated using an ozone generating short-wavelength ultraviolet light in ambient environments and characterized using Fourier-transform infrared spectroscopy, imaging ellipsometry, thin-film X-ray diffraction, and scanning electron microscopy. Results presented here indicate that the UV/ozone treatment under nominally room temperature conditions leads to complete removal of template (structure-directing-agent) from zeolite films comparable to that achieved by thermal calcination. Furthermore, spatially addressing the UV/ozone illumination pattern using a physical mask resulted in the lateral confinement of the template removal from the zeolite film leaving behind a composite film composed of templated and template-free regions. Subsequent chemical treatment of the patterned film selectively removed the as-synthesized, unexposed, regions of the film thereby providing a means for the creation of isolated zeolite film islands at predetermined locations on the substrate surface.

Original languageEnglish (US)
Pages (from-to)45-51
Number of pages7
JournalMicroporous and Mesoporous Materials
Issue number1
StatePublished - Dec 29 2005
Externally publishedYes


  • Calcination
  • Ellipsometric imaging
  • Microporous thin films
  • Patterning
  • UV/ozone

ASJC Scopus subject areas

  • Chemistry(all)
  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials


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