TY - GEN
T1 - Oscillating behavior of quality factor of a film bulk acoustic resonator in liquids
AU - Xu, W.
AU - Abbaspour-Tamijani, A.
AU - Chae, Junseok
PY - 2009/12/14
Y1 - 2009/12/14
N2 - When a film bulk acoustic resonator (FBAR) is coupled to a thin liquid layer, the quality factor (Q) of the resonator varies in a damped oscillatory pattern versus the liquid thickness. This paper reports this behavior with an analytical modeling and experimental demonstration of it. The thin liquid layer with thickness comparable to the acoustic wavelength is realized by integrating a microfluidic channel to the FBAR. Q assumes its maxima (up to 150) and minima (as low as 50) when the channel thickness is an odd multiple of quarter-wavelength and a multiple of half-wavelength, respectively. We also present a bio-molecular detection test for aptamer immobilization and thrombin binding as a proof-of-concept sensing application.
AB - When a film bulk acoustic resonator (FBAR) is coupled to a thin liquid layer, the quality factor (Q) of the resonator varies in a damped oscillatory pattern versus the liquid thickness. This paper reports this behavior with an analytical modeling and experimental demonstration of it. The thin liquid layer with thickness comparable to the acoustic wavelength is realized by integrating a microfluidic channel to the FBAR. Q assumes its maxima (up to 150) and minima (as low as 50) when the channel thickness is an odd multiple of quarter-wavelength and a multiple of half-wavelength, respectively. We also present a bio-molecular detection test for aptamer immobilization and thrombin binding as a proof-of-concept sensing application.
KW - Film bulk acoustic resonator (FBAR)
KW - Microfluidics
KW - Q factor
UR - http://www.scopus.com/inward/record.url?scp=71549116716&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=71549116716&partnerID=8YFLogxK
U2 - 10.1109/SENSOR.2009.5285419
DO - 10.1109/SENSOR.2009.5285419
M3 - Conference contribution
AN - SCOPUS:71549116716
SN - 9781424441938
T3 - TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
SP - 696
EP - 699
BT - TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
T2 - TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
Y2 - 21 June 2009 through 25 June 2009
ER -