Optimization of TiO2/Cu/TiO2 multilayer as transparent composite electrode (TCE) deposited on flexible substrate at room temperature

Aritra Dhar; Terry Alford

doi:10.1149/2.0061411ssl

Optimization of TiO₂/Cu/TiO₂ multilayer as transparent composite electrode (TCE) deposited on flexible substrate at room temperature

Aritra Dhar, Terry Alford

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Abstract

Highly transparent conductive composite electrodes made of multilayer of TiO₂ and Cu (TiO₂/Cu/ TiO₂) thin films (30/3-9/30 nm thick) are deposited onto flexible substrates at room temperature. The micro-structural, optical and electrical properties of the multilayer are studied with the use of atomic force microscopy, uv-visible spectrophotometry and Hall measurement tool. The Haacke figure of merit (FOM) has been calculated to evaluate the performance of the multilayer films. The highest FOM achieved is 6.4×10^-3 Ω ^-1 for a Cu thickness of 6 nm with a sheet resistance of 19 Ω/sq and an average transmittance of 81%.

Original language	English (US)
Pages (from-to)	N33-N36
Journal	ECS Solid State Letters
Volume	3
Issue number	11
DOIs	https://doi.org/10.1149/2.0061411ssl
State	Published - 2014

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

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title = "Optimization of TiO2/Cu/TiO2 multilayer as transparent composite electrode (TCE) deposited on flexible substrate at room temperature",

abstract = "Highly transparent conductive composite electrodes made of multilayer of TiO2 and Cu (TiO2/Cu/ TiO2) thin films (30/3-9/30 nm thick) are deposited onto flexible substrates at room temperature. The micro-structural, optical and electrical properties of the multilayer are studied with the use of atomic force microscopy, uv-visible spectrophotometry and Hall measurement tool. The Haacke figure of merit (FOM) has been calculated to evaluate the performance of the multilayer films. The highest FOM achieved is 6.4×10-3 Ω -1 for a Cu thickness of 6 nm with a sheet resistance of 19 Ω/sq and an average transmittance of 81%.",

author = "Aritra Dhar and Terry Alford",

note = "Publisher Copyright: {\textcopyright} 2014 The Electrochemical Society.",

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AU - Alford, Terry

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N2 - Highly transparent conductive composite electrodes made of multilayer of TiO2 and Cu (TiO2/Cu/ TiO2) thin films (30/3-9/30 nm thick) are deposited onto flexible substrates at room temperature. The micro-structural, optical and electrical properties of the multilayer are studied with the use of atomic force microscopy, uv-visible spectrophotometry and Hall measurement tool. The Haacke figure of merit (FOM) has been calculated to evaluate the performance of the multilayer films. The highest FOM achieved is 6.4×10-3 Ω -1 for a Cu thickness of 6 nm with a sheet resistance of 19 Ω/sq and an average transmittance of 81%.

AB - Highly transparent conductive composite electrodes made of multilayer of TiO2 and Cu (TiO2/Cu/ TiO2) thin films (30/3-9/30 nm thick) are deposited onto flexible substrates at room temperature. The micro-structural, optical and electrical properties of the multilayer are studied with the use of atomic force microscopy, uv-visible spectrophotometry and Hall measurement tool. The Haacke figure of merit (FOM) has been calculated to evaluate the performance of the multilayer films. The highest FOM achieved is 6.4×10-3 Ω -1 for a Cu thickness of 6 nm with a sheet resistance of 19 Ω/sq and an average transmittance of 81%.

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Optimization of TiO₂/Cu/TiO₂ multilayer as transparent composite electrode (TCE) deposited on flexible substrate at room temperature

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