Abstract
In this article certain concepts fundamental to the understanding of sputtered ion emission are discussed. The treatment of the escape probability of a surface-excited or ionized atom is examined in the context of three current models - the perturbation, bond-breaking and surface excitation models - and the conceptual relationships between these models are outlined. The surface photoelectron threshold is shown to be a key parameter in terms of which all three models address matrix effects, and it is shown that the variation of this parameter can account qualitatively for a wide range of matrix effects.
Original language | English (US) |
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Pages (from-to) | 241-259 |
Number of pages | 19 |
Journal | Applications of Surface Science |
Volume | 13 |
Issue number | 1-2 |
DOIs | |
State | Published - Aug 1982 |
ASJC Scopus subject areas
- Engineering(all)