Ohmic contacts to nitrogen-doped nanocarbon layers on diamond (100) surfaces

Evangeline Amonoo, Vishal Jha, Trevor Thornton, Franz A. Koeck, Robert J. Nemanich, Terry L. Alford

Research output: Contribution to journalArticlepeer-review

1 Scopus citations

Abstract

The transfer length method (TLM) was used to investigate Ohmic contact properties using the tri-layer stack Ti/Pt/Au on a nitrogen-doped n-type conducting nanocarbon (nanoC) layer grown on a diamond (100) substrate. Room temperature electrical measurements were taken, and samples were annealed to observe changes in electrical conductivity. Low specific contact resistivity values between the electrode and nanoC layer of 8 × 10−5 Ωcm2 were achieved, which is almost two orders of magnitude lower than previously reported values. The results were attributed to the increased nitrogen incorporation, and the presence of electrically active defects which leads to an increase in conduction in the nanocarbon film.

Original languageEnglish (US)
Article number109832
JournalDiamond and Related Materials
Volume135
DOIs
StatePublished - May 2023

Keywords

  • Adhesion
  • Amorphous
  • Carbide
  • Defects
  • Diamond-like carbon
  • Diffusion
  • Electrical conductivity
  • Electrical properties
  • Electrode
  • Grain boundaries
  • Graphite
  • Impurities
  • Light emission
  • Microstructure
  • Morphology
  • N-type doping
  • Nanocrystalline
  • Ohmic contacts
  • Plasma CVD

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • General Chemistry
  • Mechanical Engineering
  • Materials Chemistry
  • Electrical and Electronic Engineering
  • General Physics and Astronomy

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