Noninvasive acoustic-wave microfluidic driver

Hongyu Yu, Eun Sok Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

11 Scopus citations


This paper describes a Noninvasive Acoustic-Wave Microfluidic Driver built on a PZT sheet. The driver is based on the acoustic streaming effect and the self-focusing nature of the Fresnel Annular Sector Actuator (FASA). An array of FASAs is produced on a PZT sheet, and set adjacent to a silicon wafer to produce a fast liquid motion (up to 123 mm/s) in a 0.8 mm wide, 9 mm long and 0.2 mm deep channel in the silicon. The self-focused waves from the FASA array propagate through the 200 μm thick silicon, and act on the water contained in the channel. Three kinds of FASA arrays have been fabricated along with their associated channel structures in silicon, and shown to transport the liquids effectively. The experiment results obtained on the fabricated devices confirm the theory and simulation.

Original languageEnglish (US)
Title of host publicationProceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
Number of pages4
StatePublished - 2002
Externally publishedYes
Event15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002 - Las Vegas, NV, United States
Duration: Jan 20 2002Jan 24 2002


Other15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002
Country/TerritoryUnited States
CityLas Vegas, NV

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering
  • Mechanical Engineering


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