Molecular electronic transducer based planetary seismometer with new fabrication process

Mengbing Liang; Hai Huang; Vadim Agafonov; Rui Tang; Ruirui Han; Hongyu Yu

doi:10.1109/MEMSYS.2016.7421798

Molecular electronic transducer based planetary seismometer with new fabrication process

Mengbing Liang, Hai Huang, Vadim Agafonov, Rui Tang, Ruirui Han, Hongyu Yu

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

20 Scopus citations

Abstract

This paper describes a novel design and implementation of a short period seismometer based on molecular electronic transducer (MET) for the purpose of planetary exploration. A silicon on insulator (SOI)-based micro-fabrication is employed to reduce the hydraulic impedance of microfluidic channels in a MET device, resulting in improved noise floor and sensitivity. The resolution reached 1.78×10-7 (m/s2)/√Hz at 1.2 Hz with the sensitivity of 2500V/(m/s2).

Original language	English (US)
Title of host publication	MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	986-989
Number of pages	4
ISBN (Electronic)	9781509019731
DOIs	https://doi.org/10.1109/MEMSYS.2016.7421798
State	Published - Feb 26 2016
Event	29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016 - Shanghai, China Duration: Jan 24 2016 → Jan 28 2016

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume	2016-February
ISSN (Print)	1084-6999

Other

Other	29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016
Country/Territory	China
City	Shanghai
Period	1/24/16 → 1/28/16

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/MEMSYS.2016.7421798

Cite this

Liang, M., Huang, H., Agafonov, V., Tang, R., Han, R., & Yu, H. (2016). Molecular electronic transducer based planetary seismometer with new fabrication process. In MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems (pp. 986-989). Article 7421798 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2016-February). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2016.7421798

Molecular electronic transducer based planetary seismometer with new fabrication process. / Liang, Mengbing; Huang, Hai; Agafonov, Vadim et al.
MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc., 2016. p. 986-989 7421798 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2016-February).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Liang, M, Huang, H, Agafonov, V, Tang, R, Han, R & Yu, H 2016, Molecular electronic transducer based planetary seismometer with new fabrication process. in MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems., 7421798, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 2016-February, Institute of Electrical and Electronics Engineers Inc., pp. 986-989, 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016, Shanghai, China, 1/24/16. https://doi.org/10.1109/MEMSYS.2016.7421798

Liang M, Huang H, Agafonov V, Tang R, Han R, Yu H. Molecular electronic transducer based planetary seismometer with new fabrication process. In MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc. 2016. p. 986-989. 7421798. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2016.7421798

Liang, Mengbing ; Huang, Hai ; Agafonov, Vadim et al. / Molecular electronic transducer based planetary seismometer with new fabrication process. MEMS 2016 - 29th IEEE International Conference on Micro Electro Mechanical Systems. Institute of Electrical and Electronics Engineers Inc., 2016. pp. 986-989 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

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Molecular electronic transducer based planetary seismometer with new fabrication process

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