Micromotor operation in a liquid environment

V. R. Dhuler, M. Mehregany, S. M. Phillips

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Scopus citations


This paper presents the first account of successful electrical operation of electrostatic microactuators in a liquid environment. Successful operation of both the flange and center-pin harmonic (hereafter referred to as wobble) and salient-pole side-drive micromotors in deionized water and silicone lubricating oil is achieved. The performance characteristics of the micromotors in a liquid are different from those in a gas environment. The minimum operating voltages are typically higher for operation in the liquids studied, while the maximum motor speeds possible are significantly lower. The motive torque is increased by the relative dielectric constant of the liquid, while the viscous drag torque is increased due to the high viscosity of the liquid. In contrast to operation in a gas environment, in a liquid, the gear ratio of the wobble micromotors is dependent on the excitation speed.

Original languageEnglish (US)
Title of host publicationTechnical Digest- IEEE Solid-State Sensor and Actuator Workshop
Editors Anon
PublisherPubl by IEEE
Number of pages4
ISBN (Print)078030456X
StatePublished - 1992
Externally publishedYes
EventProceedings of the 5th IEEE Solid-State Sensor and Actuator Workshop - Hilton Head Island, SC, USA
Duration: Jun 22 1992Jun 25 1992

Publication series

NameTechnical Digest- IEEE Solid-State Sensor and Actuator Workshop


OtherProceedings of the 5th IEEE Solid-State Sensor and Actuator Workshop
CityHilton Head Island, SC, USA

ASJC Scopus subject areas

  • General Engineering


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