Micromachined accelerometers for inertial navigation applications

Junseok Chae, Haluk Kulah, Khalil Najafi

Research output: Chapter in Book/Report/Conference proceedingConference contribution


This paper presents research at The University of Michigan on micromachined accelerometers and their interface electronics to satisfy the requirements for inertial navigation applications. The accelerometer systems developed employ in-plane (lateral), out-of-plane (z-axis), and single-chip 3-axis sensors with the interface electronics. The interface electronics forms a second-order electromechanical sigma-delta modulator together with the sensor and the system can be operated in both open and closed-loop. These devices can achieve better than 2μg/√Hz resolution with a range of ±1.35g.

Original languageEnglish (US)
Title of host publicationSAE Technical Papers
StatePublished - 2005
Externally publishedYes
Event2005 SAE World Congress - Detroit, MI, United States
Duration: Apr 11 2005Apr 14 2005


Other2005 SAE World Congress
Country/TerritoryUnited States
CityDetroit, MI

ASJC Scopus subject areas

  • Automotive Engineering
  • Safety, Risk, Reliability and Quality
  • Pollution
  • Industrial and Manufacturing Engineering


Dive into the research topics of 'Micromachined accelerometers for inertial navigation applications'. Together they form a unique fingerprint.

Cite this