Microelectromechanical systems (MEMS) based-ultrasonic electrostatic actuators on a flexible substrate

Sangpyeong Kim; Xu Zhang; Robin Daugherty; Ed Lee; George Kunnen; David Allee; Eric Forsythe; Junseok Chae

doi:10.1109/LED.2012.2195630

Microelectromechanical systems (MEMS) based-ultrasonic electrostatic actuators on a flexible substrate

Sangpyeong Kim
, Xu Zhang
, Robin Daugherty
, Ed Lee
, George Kunnen
, David Allee
, Eric Forsythe
, Junseok Chae

Research output: Contribution to journal › Article › peer-review

16 Scopus citations

Abstract

We present a microelectromechanical systems (MEMS)-based electrostatic actuator on a flexible substrate, made of polyethylene naphthalate, which emits acoustic waves at ultrasonic frequencies. The actuator has a suspended diaphragm, made of parylene, of 2-6-mm diameter and a 6-μ gap between the diaphragm and substrate. The actuator is driven by hydrogenated amorphous silicon integrated circuits. The driving circuits consist of voltage-controlled oscillator and buffer chain, which can tune the output voltage from 3 to 32 V with 35-V supply. A single actuator emits ultrasonic waves at 25 kHz and pressure of 27-dB sound pressure level (SPL), and a 1 × 2 array emits up to 34.6-dB SPL at 1-cm distance.

Original language	English (US)
Article number	6204318
Pages (from-to)	1072-1074
Number of pages	3
Journal	IEEE Electron Device Letters
Volume	33
Issue number	7
DOIs	https://doi.org/10.1109/LED.2012.2195630
State	Published - 2012

Keywords

Electrostatic actuator
microelectromechanical systems (MEMS)
ultrasonic actuator

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

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10.1109/LED.2012.2195630

Cite this

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title = "Microelectromechanical systems (MEMS) based-ultrasonic electrostatic actuators on a flexible substrate",

abstract = "We present a microelectromechanical systems (MEMS)-based electrostatic actuator on a flexible substrate, made of polyethylene naphthalate, which emits acoustic waves at ultrasonic frequencies. The actuator has a suspended diaphragm, made of parylene, of 2-6-mm diameter and a 6-μ gap between the diaphragm and substrate. The actuator is driven by hydrogenated amorphous silicon integrated circuits. The driving circuits consist of voltage-controlled oscillator and buffer chain, which can tune the output voltage from 3 to 32 V with 35-V supply. A single actuator emits ultrasonic waves at 25 kHz and pressure of 27-dB sound pressure level (SPL), and a 1 × 2 array emits up to 34.6-dB SPL at 1-cm distance.",

keywords = "Electrostatic actuator, microelectromechanical systems (MEMS), ultrasonic actuator",

author = "Sangpyeong Kim and Xu Zhang and Robin Daugherty and Ed Lee and George Kunnen and David Allee and Eric Forsythe and Junseok Chae",

note = "Funding Information: Manuscript received January 6, 2012; revised March 9, 2012; accepted March 25, 2012. Date of publication May 24, 2012; date of current version June 22, 2012. This work was supported by the Army Research Laboratory under Cooperative Agreement W911NG-04-2-0005. The review of this letter was arranged by Editor A. Flewitt.",

year = "2012",

doi = "10.1109/LED.2012.2195630",

language = "English (US)",

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journal = "IEEE Electron Device Letters",

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T1 - Microelectromechanical systems (MEMS) based-ultrasonic electrostatic actuators on a flexible substrate

AU - Kim, Sangpyeong

AU - Zhang, Xu

AU - Daugherty, Robin

AU - Lee, Ed

AU - Kunnen, George

AU - Allee, David

AU - Forsythe, Eric

AU - Chae, Junseok

N1 - Funding Information: Manuscript received January 6, 2012; revised March 9, 2012; accepted March 25, 2012. Date of publication May 24, 2012; date of current version June 22, 2012. This work was supported by the Army Research Laboratory under Cooperative Agreement W911NG-04-2-0005. The review of this letter was arranged by Editor A. Flewitt.

PY - 2012

Y1 - 2012

N2 - We present a microelectromechanical systems (MEMS)-based electrostatic actuator on a flexible substrate, made of polyethylene naphthalate, which emits acoustic waves at ultrasonic frequencies. The actuator has a suspended diaphragm, made of parylene, of 2-6-mm diameter and a 6-μ gap between the diaphragm and substrate. The actuator is driven by hydrogenated amorphous silicon integrated circuits. The driving circuits consist of voltage-controlled oscillator and buffer chain, which can tune the output voltage from 3 to 32 V with 35-V supply. A single actuator emits ultrasonic waves at 25 kHz and pressure of 27-dB sound pressure level (SPL), and a 1 × 2 array emits up to 34.6-dB SPL at 1-cm distance.

AB - We present a microelectromechanical systems (MEMS)-based electrostatic actuator on a flexible substrate, made of polyethylene naphthalate, which emits acoustic waves at ultrasonic frequencies. The actuator has a suspended diaphragm, made of parylene, of 2-6-mm diameter and a 6-μ gap between the diaphragm and substrate. The actuator is driven by hydrogenated amorphous silicon integrated circuits. The driving circuits consist of voltage-controlled oscillator and buffer chain, which can tune the output voltage from 3 to 32 V with 35-V supply. A single actuator emits ultrasonic waves at 25 kHz and pressure of 27-dB sound pressure level (SPL), and a 1 × 2 array emits up to 34.6-dB SPL at 1-cm distance.

KW - Electrostatic actuator

KW - microelectromechanical systems (MEMS)

KW - ultrasonic actuator

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UR - https://www.scopus.com/pages/publications/84862837269#tab=citedBy

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DO - 10.1109/LED.2012.2195630

M3 - Article

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SN - 0741-3106

VL - 33

SP - 1072

EP - 1074

JO - IEEE Electron Device Letters

JF - IEEE Electron Device Letters

IS - 7

M1 - 6204318

ER -

Microelectromechanical systems (MEMS) based-ultrasonic electrostatic actuators on a flexible substrate

Abstract

Keywords

ASJC Scopus subject areas

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