TY - JOUR
T1 - Microelectromechanical systems (MEMS) based-ultrasonic electrostatic actuators on a flexible substrate
AU - Kim, Sangpyeong
AU - Zhang, Xu
AU - Daugherty, Robin
AU - Lee, Ed
AU - Kunnen, George
AU - Allee, David
AU - Forsythe, Eric
AU - Chae, Junseok
N1 - Funding Information:
Manuscript received January 6, 2012; revised March 9, 2012; accepted March 25, 2012. Date of publication May 24, 2012; date of current version June 22, 2012. This work was supported by the Army Research Laboratory under Cooperative Agreement W911NG-04-2-0005. The review of this letter was arranged by Editor A. Flewitt.
PY - 2012
Y1 - 2012
N2 - We present a microelectromechanical systems (MEMS)-based electrostatic actuator on a flexible substrate, made of polyethylene naphthalate, which emits acoustic waves at ultrasonic frequencies. The actuator has a suspended diaphragm, made of parylene, of 2-6-mm diameter and a 6-μ gap between the diaphragm and substrate. The actuator is driven by hydrogenated amorphous silicon integrated circuits. The driving circuits consist of voltage-controlled oscillator and buffer chain, which can tune the output voltage from 3 to 32 V with 35-V supply. A single actuator emits ultrasonic waves at 25 kHz and pressure of 27-dB sound pressure level (SPL), and a 1 × 2 array emits up to 34.6-dB SPL at 1-cm distance.
AB - We present a microelectromechanical systems (MEMS)-based electrostatic actuator on a flexible substrate, made of polyethylene naphthalate, which emits acoustic waves at ultrasonic frequencies. The actuator has a suspended diaphragm, made of parylene, of 2-6-mm diameter and a 6-μ gap between the diaphragm and substrate. The actuator is driven by hydrogenated amorphous silicon integrated circuits. The driving circuits consist of voltage-controlled oscillator and buffer chain, which can tune the output voltage from 3 to 32 V with 35-V supply. A single actuator emits ultrasonic waves at 25 kHz and pressure of 27-dB sound pressure level (SPL), and a 1 × 2 array emits up to 34.6-dB SPL at 1-cm distance.
KW - Electrostatic actuator
KW - microelectromechanical systems (MEMS)
KW - ultrasonic actuator
UR - http://www.scopus.com/inward/record.url?scp=84862837269&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84862837269&partnerID=8YFLogxK
U2 - 10.1109/LED.2012.2195630
DO - 10.1109/LED.2012.2195630
M3 - Article
AN - SCOPUS:84862837269
SN - 0741-3106
VL - 33
SP - 1072
EP - 1074
JO - IEEE Electron Device Letters
JF - IEEE Electron Device Letters
IS - 7
M1 - 6204318
ER -