Microelectromechanical systems (MEMS) based-ultrasonic electrostatic actuators on a flexible substrate

Sangpyeong Kim, Xu Zhang, Robin Daugherty, Ed Lee, George Kunnen, David Allee, Eric Forsythe, Junseok Chae

Research output: Contribution to journalArticlepeer-review

14 Scopus citations


We present a microelectromechanical systems (MEMS)-based electrostatic actuator on a flexible substrate, made of polyethylene naphthalate, which emits acoustic waves at ultrasonic frequencies. The actuator has a suspended diaphragm, made of parylene, of 2-6-mm diameter and a 6-μ gap between the diaphragm and substrate. The actuator is driven by hydrogenated amorphous silicon integrated circuits. The driving circuits consist of voltage-controlled oscillator and buffer chain, which can tune the output voltage from 3 to 32 V with 35-V supply. A single actuator emits ultrasonic waves at 25 kHz and pressure of 27-dB sound pressure level (SPL), and a 1 × 2 array emits up to 34.6-dB SPL at 1-cm distance.

Original languageEnglish (US)
Article number6204318
Pages (from-to)1072-1074
Number of pages3
JournalIEEE Electron Device Letters
Issue number7
StatePublished - 2012


  • Electrostatic actuator
  • microelectromechanical systems (MEMS)
  • ultrasonic actuator

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering


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