TY - GEN
T1 - MEMS optical position sensor for sun tracking
AU - Welch, David
AU - Blain Christen, Jennifer
N1 - Publisher Copyright:
© 2015 IEEE.
PY - 2015/7/27
Y1 - 2015/7/27
N2 - We demonstrate a sun tracking sensor fabricated in the MultiMEMS SensoNor process. The sensor uses a quadrant photodetector to determine the position of a projected shadow. Differential measurement of pairs of photodiodes allows simultaneous dual-axis readings. The sensing structure was manufactured in the commercial MultiMEMS process, so it can be easily reproduced in large quantities. The device was tested from -45° to +45° to verify performance. Results show a linear correlation between a mapped output and angle of incident light with an R2 value of 0.995. The small size, robust structure, and minimal post-processing make it well-suited for sun tracking applications.
AB - We demonstrate a sun tracking sensor fabricated in the MultiMEMS SensoNor process. The sensor uses a quadrant photodetector to determine the position of a projected shadow. Differential measurement of pairs of photodiodes allows simultaneous dual-axis readings. The sensing structure was manufactured in the commercial MultiMEMS process, so it can be easily reproduced in large quantities. The device was tested from -45° to +45° to verify performance. Results show a linear correlation between a mapped output and angle of incident light with an R2 value of 0.995. The small size, robust structure, and minimal post-processing make it well-suited for sun tracking applications.
UR - http://www.scopus.com/inward/record.url?scp=84946226798&partnerID=8YFLogxK
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U2 - 10.1109/ISCAS.2015.7169023
DO - 10.1109/ISCAS.2015.7169023
M3 - Conference contribution
AN - SCOPUS:84946226798
T3 - Proceedings - IEEE International Symposium on Circuits and Systems
SP - 1874
EP - 1878
BT - 2015 IEEE International Symposium on Circuits and Systems, ISCAS 2015
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - IEEE International Symposium on Circuits and Systems, ISCAS 2015
Y2 - 24 May 2015 through 27 May 2015
ER -