MEMS optical position sensor for sun tracking

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Scopus citations

Abstract

We demonstrate a sun tracking sensor fabricated in the MultiMEMS SensoNor process. The sensor uses a quadrant photodetector to determine the position of a projected shadow. Differential measurement of pairs of photodiodes allows simultaneous dual-axis readings. The sensing structure was manufactured in the commercial MultiMEMS process, so it can be easily reproduced in large quantities. The device was tested from -45° to +45° to verify performance. Results show a linear correlation between a mapped output and angle of incident light with an R2 value of 0.995. The small size, robust structure, and minimal post-processing make it well-suited for sun tracking applications.

Original languageEnglish (US)
Title of host publication2015 IEEE International Symposium on Circuits and Systems, ISCAS 2015
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1874-1878
Number of pages5
ISBN (Electronic)9781479983919
DOIs
StatePublished - Jul 27 2015
EventIEEE International Symposium on Circuits and Systems, ISCAS 2015 - Lisbon, Portugal
Duration: May 24 2015May 27 2015

Publication series

NameProceedings - IEEE International Symposium on Circuits and Systems
Volume2015-July
ISSN (Print)0271-4310

Other

OtherIEEE International Symposium on Circuits and Systems, ISCAS 2015
Country/TerritoryPortugal
CityLisbon
Period5/24/155/27/15

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Fingerprint

Dive into the research topics of 'MEMS optical position sensor for sun tracking'. Together they form a unique fingerprint.

Cite this