Location of adatoms on Si(100) surface using the electron channeling effect on Auger electron emission

Described is the principle of atomic-site location by channeling enhanced microanalysis (ALCHEMI) technique. The electron intensities on crystallographic sites within unit cell oscillate with variation of the incident beam direction. The corresponding characteristics emission spectra from atoms at those atomic sites follow these oscillations if the inelastic scattering events are localized. By analyzing the spectra of the impurity species and reference atoms on known sites at various tilting angles, the location of the impurity atoms can be obtained. This paper study the possible application of this technique for locating adatom positions on a crystal surface, using the channeling effect on characteristic Auger emissions.