@inproceedings{0a3adfaa3d434089afb910125f3395ff,
title = "Large area plan-view transmission electron microscopy sample preparation for multijunction metamorphic solar cell devices",
abstract = "A focused ion beam (FIB) sample preparation technique is developed to produce very large areas of electron transparent material for plan-view transmission electron microscopy measurements from specific layers in a multi-layer device structure. An initial cross section FIB cut allows plan-view sample creation from any layer of interest, and therefore rapid characterization of the defect density as a function of depth is achievable for structures containing multiple layers, such as multi-junction metamorphic layer structures for high efficiency III-V solar cells. Uniform electron transparent plan-view areas of greater than 100 μm2 are extracted from a cross-section to facilitate observation of defect densities as low as ∼106 cm-2. To demonstrate the technique, the active cell layers of two inverted metamorphic III-V solar cell structures have been imaged to reveal defect densities as high as 109 cm2 and as low as 10 6 cm-2.",
keywords = "Defect characterization, TEM, metamorphic devices, plan view",
author = "Jackson, {M. J.} and Jackson, {B. L.} and N. Bodzin and A. Zakaira and Liu, {X. Q.} and King, {R. R.} and Goorsky, {M. S.}",
year = "2012",
month = nov,
day = "26",
doi = "10.1109/PVSC.2012.6317906",
language = "English (US)",
isbn = "9781467300643",
series = "Conference Record of the IEEE Photovoltaic Specialists Conference",
pages = "1620--1623",
booktitle = "Program - 38th IEEE Photovoltaic Specialists Conference, PVSC 2012",
note = "38th IEEE Photovoltaic Specialists Conference, PVSC 2012 ; Conference date: 03-06-2012 Through 08-06-2012",
}