Integration of a novel electrochemical tuning scheme with MEMS surface micromachined resonators

S. Enderling; C. L. Brown; M. Balakrishnan; J. Hedley; J. T M Stevenson; S. Bond; C. C. Dunare; A. J. Harris; J. S. Burdess; M. Mitkova; Michael Kozicki; A. J. Walton

Integration of a novel electrochemical tuning scheme with MEMS surface micromachined resonators

S. Enderling, C. L. Brown, M. Balakrishnan, J. Hedley, J. T M Stevenson, S. Bond, C. C. Dunare, A. J. Harris, J. S. Burdess, M. Mitkova, Michael Kozicki, A. J. Walton

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

8 Scopus citations

Abstract

A novel, fully functional silver (Ag) electrodeposition process has been integrated into surface micromachined polysilicon resonators for the purpose of resonant frequency tuning. Application of different DC tuning voltages between a Ag anode and inert aluminium cathodes caused frequency changes ranging from -10% to 10.7%. This process presents a promising technique for dynamic in-situ, low voltage frequency tuning to the field of RF MEMS.

Original language	English (US)
Title of host publication	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Pages	159-162
Number of pages	4
State	Published - 2005
Event	18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami - Miami Beach, FL, United States Duration: Jan 30 2005 → Feb 3 2005

Other

Other	18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami
Country/Territory	United States
City	Miami Beach, FL
Period	1/30/05 → 2/3/05

ASJC Scopus subject areas

Mechanical Engineering
Electrical and Electronic Engineering
Control and Systems Engineering

Cite this

Enderling, S., Brown, C. L., Balakrishnan, M., Hedley, J., Stevenson, J. T. M., Bond, S., Dunare, C. C., Harris, A. J., Burdess, J. S., Mitkova, M., Kozicki, M., & Walton, A. J. (2005). Integration of a novel electrochemical tuning scheme with MEMS surface micromachined resonators. In Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 159-162). Article MP26

Enderling, S, Brown, CL, Balakrishnan, M, Hedley, J, Stevenson, JTM, Bond, S, Dunare, CC, Harris, AJ, Burdess, JS, Mitkova, M, Kozicki, M & Walton, AJ 2005, Integration of a novel electrochemical tuning scheme with MEMS surface micromachined resonators. in Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)., MP26, pp. 159-162, 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami, Miami Beach, FL, United States, 1/30/05.

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abstract = "A novel, fully functional silver (Ag) electrodeposition process has been integrated into surface micromachined polysilicon resonators for the purpose of resonant frequency tuning. Application of different DC tuning voltages between a Ag anode and inert aluminium cathodes caused frequency changes ranging from -10% to 10.7%. This process presents a promising technique for dynamic in-situ, low voltage frequency tuning to the field of RF MEMS.",

author = "S. Enderling and Brown, {C. L.} and M. Balakrishnan and J. Hedley and Stevenson, {J. T M} and S. Bond and Dunare, {C. C.} and Harris, {A. J.} and Burdess, {J. S.} and M. Mitkova and Michael Kozicki and Walton, {A. J.}",

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language = "English (US)",

pages = "159--162",

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AU - Enderling, S.

AU - Brown, C. L.

AU - Balakrishnan, M.

AU - Hedley, J.

AU - Stevenson, J. T M

AU - Bond, S.

AU - Dunare, C. C.

AU - Harris, A. J.

AU - Burdess, J. S.

AU - Mitkova, M.

AU - Kozicki, Michael

AU - Walton, A. J.

PY - 2005

Y1 - 2005

N2 - A novel, fully functional silver (Ag) electrodeposition process has been integrated into surface micromachined polysilicon resonators for the purpose of resonant frequency tuning. Application of different DC tuning voltages between a Ag anode and inert aluminium cathodes caused frequency changes ranging from -10% to 10.7%. This process presents a promising technique for dynamic in-situ, low voltage frequency tuning to the field of RF MEMS.

AB - A novel, fully functional silver (Ag) electrodeposition process has been integrated into surface micromachined polysilicon resonators for the purpose of resonant frequency tuning. Application of different DC tuning voltages between a Ag anode and inert aluminium cathodes caused frequency changes ranging from -10% to 10.7%. This process presents a promising technique for dynamic in-situ, low voltage frequency tuning to the field of RF MEMS.

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M3 - Conference contribution

AN - SCOPUS:26944477011

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BT - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

T2 - 18th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2005 Miami

Y2 - 30 January 2005 through 3 February 2005

ER -

Integration of a novel electrochemical tuning scheme with MEMS surface micromachined resonators

Abstract

Other

ASJC Scopus subject areas

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