In this paper we present an approach towards a biosensor based on the gating action of ion channel proteins integrated on a silicon chip using planar microfabrication technology. The ion channels are inserted into lipid bilayer membranes which are supported across apertures in the wafer. The use of deep silicon reactive ion etching allows fast and exible fabrication of these apertures in the range of 150 μm diameter with the potential for future downscaling. A plasma-deposited surface modi cation layer was introduced to increase the hydrophobicity of the sample and allow reproducible bilayer formation with gigaohm seal resistances. Studies on patterned planar Ag/AgCl electrodes show a good longterm stability of the Nernst potential and an easy integration with the microfabricated aperture.

Original languageEnglish (US)
Title of host publication2004 4th IEEE Conference on Nanotechnology
Number of pages3
StatePublished - 2004
Event2004 4th IEEE Conference on Nanotechnology - Munich, Germany
Duration: Aug 16 2004Aug 19 2004

Publication series

Name2004 4th IEEE Conference on Nanotechnology


Other2004 4th IEEE Conference on Nanotechnology


  • Biosensors
  • Ion channels
  • Lipid bilayer membranes
  • Reversible electrodes

ASJC Scopus subject areas

  • General Engineering


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