Keyphrases
Agglomerates
50%
Annealing
100%
Grain Boundary
50%
In Situ
50%
Initial Reaction
100%
Interdiffusion
50%
Isothermal Annealing
50%
Processing Stages
50%
Raman Spectra
100%
Raman Spectroscopy
100%
Reaction Formation
100%
Rutile
100%
Si (100) Substrate
50%
Silicide
50%
Silicide Formation
100%
Sputtered Ti
50%
Ti Film
50%
TiSi2
50%
UHV Systems
50%
Material Science
Annealing
66%
Film
33%
Grain Boundary
33%
Nucleation
33%
Raman Spectroscopy
100%
Silicide
100%
Silicon
100%
Titanium
100%
Engineering
Initial Phase
50%
Interdiffusion
50%
Isothermal Annealing
50%
Processing Stage
50%
Raman Spectra
100%
Physics
Grain Boundary
50%
Nucleation
50%
Raman Spectra
100%
Raman Spectroscopy
100%
Earth and Planetary Sciences
Nucleation
33%
Raman Spectra
66%
Silicide
100%