Abstract
The range of phenomena associated with the introduction of hydrogen into single-crystal semiconductors is reviewed with emphasis on the following current topics: dissociation of hydrogen-dopant complexes, diatomic hydrogen complexes, and hydrogen-induced defects. Included is a tabulation of the parameters that have thus far been deduced from experimental studies on hydrogen-dopant complexes and hydrogen migration in crystalline silicon and gallium arsenide.
Original language | English (US) |
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Pages (from-to) | 3-20 |
Number of pages | 18 |
Journal | Physica B: Physics of Condensed Matter |
Volume | 170 |
Issue number | 1-4 |
DOIs | |
State | Published - Apr 1991 |
Externally published | Yes |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Electrical and Electronic Engineering