Highly automated electron energy-loss spectroscopy elemental quantification

Raman D. Narayan, J. K. Weiss, Peter Rez

Research output: Contribution to journalArticlepeer-review

1 Scopus citations


A model-based fitting algorithm for electron energy-loss spectroscopy spectra is introduced, along with an intuitive user-interface. As with Verbeeck & Van Aert, the measured spectrum, rather than the single scattering distribution, is fit over a wide range. An approximation is developed that allows for accurate modeling while maintaining linearity in the parameters that represent elemental composition. Also, a method is given for generating a model for the low-loss background that incorporates plural scattering. Operation of the user-interface is described to demonstrate the ease of use that allows even nonexpert users to quickly obtain elemental analysis results.

Original languageEnglish (US)
Pages (from-to)798-806
Number of pages9
JournalMicroscopy and Microanalysis
Issue number3
StatePublished - Jun 2014


  • EELS
  • fitting
  • model
  • multiple scattering
  • plural scattering
  • quantification

ASJC Scopus subject areas

  • Instrumentation


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