High-tech equipment simulation

John Robertson, Sivakumar Venkatanarayanan

    Research output: Contribution to journalConference articlepeer-review


    Tools used to fabricate integrated circuits have now reached a level of cost and complexity that are far beyond the capacity of an academic group to acquire or (even if donated) to support adequately. Simulation is an obvious but underused way to provide a broad and realistic environment to demonstrate how the tools work. This paper describes simulation of an ion implanter and simulations for other tools are being developed using the same principles. The control computer emulates all the typical features of a real machine (physical set-up, calibration and operation). In addition, typical faults in the tool can also be introduced. The tool simulator can also be linked to conventional process simulators for virtual lab activities at several course levels.

    Original languageEnglish (US)
    Pages (from-to)2799-2806
    Number of pages8
    JournalASEE Annual Conference Proceedings
    StatePublished - 2003
    Event2003 ASEE Annual Conference and Exposition: Staying in Tune with Engineering Education - Nashville, TN, United States
    Duration: Jun 22 2003Jun 25 2003

    ASJC Scopus subject areas

    • General Engineering


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