High-resolution scanning electron microscopy and microanalysis of supported metal catalysts

The use of a high-brightness field emission gun and novel secondary electron detection systems makes it possible to acquire nanometer-resolution surface images of bulk materials, even at low electron beam voltages. The advantages of low-voltage SEM include enhanced surface sensitivity, reduced sample charging on non-conducting materials, and significantly reduced electron range and interaction volume. High-resolution images formed by collecting the backscattered electron signal can give information about the size and spatial distribution of metal nanoparticles in supported catalysts. Low-voltage XEDS can provide compositional information of bulk samples with enhanced surface sensitivity and significantly improved spatial resolution. High-resolution SEM techniques enhance our ability to detect and, subsequently, analyze the composition of nanoparticles in supported metal catalysts. Applications of high-resolution SEM imaging and microanalysis techniques to the study of industrial supported catalysts are discussed.