Green materials in semiconductors: perspective from the IRDS beyond-CMOS roadmap

Akiko Ueda; Hiroyuki Akinaga; Sapan Agarwal; Joseph A. Hagmann; Shamik Das; Matthew J. Marinella; An Chen

doi:10.1088/1361-6528/adb041

Green materials in semiconductors: perspective from the IRDS beyond-CMOS roadmap

Akiko Ueda, Hiroyuki Akinaga, Sapan Agarwal, Joseph A. Hagmann, Shamik Das, Matthew J. Marinella, An Chen

Research output: Contribution to journal › Review article › peer-review

Abstract

Environmental, safety, health, and sustainability (ESHS) have become an indispensable issue in the semiconductor industry. The ‘Beyond CMOS’ chapter of the International Roadmap for Devices and Systems roadmap introduces the concept of ‘Green materials’, emphasizing their importance for maintaining sustainability in semiconductor manufacturing. We discuss the current trends of emerging architectures and devices in the perspective of ‘Green materials’. Additionally, we highlight the significance of benchmarking and standardization in advancing sustainable practices within the semiconductor industries.

Original language	English (US)
Article number	142001
Journal	Nanotechnology
Volume	36
Issue number	14
DOIs	https://doi.org/10.1088/1361-6528/adb041
State	Published - Apr 7 2025
Externally published	Yes

Keywords

ESHS
beyond CMOS
emerging computer architectures
emerging logic devices
emerging memories
green materials
standardization

ASJC Scopus subject areas

Bioengineering
General Chemistry
General Materials Science
Mechanics of Materials
Mechanical Engineering
Electrical and Electronic Engineering

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10.1088/1361-6528/adb041

Cite this

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title = "Green materials in semiconductors: perspective from the IRDS beyond-CMOS roadmap",

abstract = "Environmental, safety, health, and sustainability (ESHS) have become an indispensable issue in the semiconductor industry. The {\textquoteleft}Beyond CMOS{\textquoteright} chapter of the International Roadmap for Devices and Systems roadmap introduces the concept of {\textquoteleft}Green materials{\textquoteright}, emphasizing their importance for maintaining sustainability in semiconductor manufacturing. We discuss the current trends of emerging architectures and devices in the perspective of {\textquoteleft}Green materials{\textquoteright}. Additionally, we highlight the significance of benchmarking and standardization in advancing sustainable practices within the semiconductor industries.",

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T2 - perspective from the IRDS beyond-CMOS roadmap

AU - Ueda, Akiko

AU - Akinaga, Hiroyuki

AU - Agarwal, Sapan

AU - Hagmann, Joseph A.

AU - Das, Shamik

AU - Marinella, Matthew J.

AU - Chen, An

PY - 2025/4/7

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N2 - Environmental, safety, health, and sustainability (ESHS) have become an indispensable issue in the semiconductor industry. The ‘Beyond CMOS’ chapter of the International Roadmap for Devices and Systems roadmap introduces the concept of ‘Green materials’, emphasizing their importance for maintaining sustainability in semiconductor manufacturing. We discuss the current trends of emerging architectures and devices in the perspective of ‘Green materials’. Additionally, we highlight the significance of benchmarking and standardization in advancing sustainable practices within the semiconductor industries.

AB - Environmental, safety, health, and sustainability (ESHS) have become an indispensable issue in the semiconductor industry. The ‘Beyond CMOS’ chapter of the International Roadmap for Devices and Systems roadmap introduces the concept of ‘Green materials’, emphasizing their importance for maintaining sustainability in semiconductor manufacturing. We discuss the current trends of emerging architectures and devices in the perspective of ‘Green materials’. Additionally, we highlight the significance of benchmarking and standardization in advancing sustainable practices within the semiconductor industries.

KW - ESHS

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KW - emerging computer architectures

KW - emerging logic devices

KW - emerging memories

KW - green materials

KW - standardization

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Green materials in semiconductors: perspective from the IRDS beyond-CMOS roadmap

Abstract

Keywords

ASJC Scopus subject areas

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