Fully differential current-mode MEMS dual-axis optical inclination sensor

David Welch; Julius Georgiou; Jennifer Blain Christen

doi:10.1016/j.sna.2012.12.001

Fully differential current-mode MEMS dual-axis optical inclination sensor

David Welch, Julius Georgiou, Jennifer Blain Christen

Research output: Contribution to journal › Article › peer-review

16 Scopus citations

Abstract

We demonstrate a tilt sensor fabricated in the MultiMEMS SensoNor process. The system uses an array of four photodiodes to determine the position of a bubble fluid pendulum and the tilt angle with respect to gravity. The entire sensing structure was manufactured in the commercial MultiMEMS process so it can be easily reproduced in large quantities. The device was tested across a range of inclinations to verify performance in sensing two axis tilt. Results for tilt measurements from -45° to +45° show correlation to expected values with an R² value of 0.99595. The resolution of the device is 0.5° at zero degrees of inclination. The outputs of the sensor are mapped to a fit equation to allow calculation of inclination angle. The small size, simple structure, and minimal power consumption make it well-suited for a number of research and industrial applications.

Original language	English (US)
Pages (from-to)	133-139
Number of pages	7
Journal	Sensors and Actuators, A: Physical
Volume	192
DOIs	https://doi.org/10.1016/j.sna.2012.12.001
State	Published - 2013

Keywords

Inclinometer
MEMS
Microfluidic
Quadrant photodetector
Tilt sensor

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering

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10.1016/j.sna.2012.12.001

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@article{f427bfc503874d0a8158be6725de352f,

title = "Fully differential current-mode MEMS dual-axis optical inclination sensor",

abstract = "We demonstrate a tilt sensor fabricated in the MultiMEMS SensoNor process. The system uses an array of four photodiodes to determine the position of a bubble fluid pendulum and the tilt angle with respect to gravity. The entire sensing structure was manufactured in the commercial MultiMEMS process so it can be easily reproduced in large quantities. The device was tested across a range of inclinations to verify performance in sensing two axis tilt. Results for tilt measurements from -45° to +45° show correlation to expected values with an R2 value of 0.99595. The resolution of the device is 0.5° at zero degrees of inclination. The outputs of the sensor are mapped to a fit equation to allow calculation of inclination angle. The small size, simple structure, and minimal power consumption make it well-suited for a number of research and industrial applications.",

keywords = "Inclinometer, MEMS, Microfluidic, Quadrant photodetector, Tilt sensor",

author = "David Welch and Julius Georgiou and {Blain Christen}, Jennifer",

note = "Funding Information: The authors would like to thank Daniel Lapadatu from SensoNor for his assistance with the MulitMEMS process and Christopher Kady, Christopher Gardner, and Hany Arafa for their assistance with the tilt platform. We would also like to thank the STIMESI Design Contest Committee for funding awarded through the competition. ",

year = "2013",

doi = "10.1016/j.sna.2012.12.001",

language = "English (US)",

volume = "192",

pages = "133--139",

journal = "Sensors and Actuators, A: Physical",

issn = "0924-4247",

publisher = "Elsevier",

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TY - JOUR

T1 - Fully differential current-mode MEMS dual-axis optical inclination sensor

AU - Welch, David

AU - Georgiou, Julius

AU - Blain Christen, Jennifer

N1 - Funding Information: The authors would like to thank Daniel Lapadatu from SensoNor for his assistance with the MulitMEMS process and Christopher Kady, Christopher Gardner, and Hany Arafa for their assistance with the tilt platform. We would also like to thank the STIMESI Design Contest Committee for funding awarded through the competition.

PY - 2013

Y1 - 2013

N2 - We demonstrate a tilt sensor fabricated in the MultiMEMS SensoNor process. The system uses an array of four photodiodes to determine the position of a bubble fluid pendulum and the tilt angle with respect to gravity. The entire sensing structure was manufactured in the commercial MultiMEMS process so it can be easily reproduced in large quantities. The device was tested across a range of inclinations to verify performance in sensing two axis tilt. Results for tilt measurements from -45° to +45° show correlation to expected values with an R2 value of 0.99595. The resolution of the device is 0.5° at zero degrees of inclination. The outputs of the sensor are mapped to a fit equation to allow calculation of inclination angle. The small size, simple structure, and minimal power consumption make it well-suited for a number of research and industrial applications.

AB - We demonstrate a tilt sensor fabricated in the MultiMEMS SensoNor process. The system uses an array of four photodiodes to determine the position of a bubble fluid pendulum and the tilt angle with respect to gravity. The entire sensing structure was manufactured in the commercial MultiMEMS process so it can be easily reproduced in large quantities. The device was tested across a range of inclinations to verify performance in sensing two axis tilt. Results for tilt measurements from -45° to +45° show correlation to expected values with an R2 value of 0.99595. The resolution of the device is 0.5° at zero degrees of inclination. The outputs of the sensor are mapped to a fit equation to allow calculation of inclination angle. The small size, simple structure, and minimal power consumption make it well-suited for a number of research and industrial applications.

KW - Inclinometer

KW - MEMS

KW - Microfluidic

KW - Quadrant photodetector

KW - Tilt sensor

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U2 - 10.1016/j.sna.2012.12.001

DO - 10.1016/j.sna.2012.12.001

M3 - Article

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SN - 0924-4247

VL - 192

SP - 133

EP - 139

JO - Sensors and Actuators, A: Physical

JF - Sensors and Actuators, A: Physical

ER -

Fully differential current-mode MEMS dual-axis optical inclination sensor

Abstract

Keywords

ASJC Scopus subject areas

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