@inproceedings{ceebf0854b9e4370a2c43994aed00d90,
title = "Fabrication and opto-electric properties of silicon based heterojunction SIS cells",
abstract = "ITO/AZO double films were deposited by RF sputtering on p-Si texturized substrate to fabricate ITO/AZO/SiO2/p-Si SIS heterojunction. The structural, optics and electrical properties of the ITO/AZO films were characterized by UV-VIS spectrophotometer, four point probe, respectively. The results show that ITO/AZO films have good quality. The electrical junction properties were investigated by I-V measurement, which reveals that the heterojunction shows typical good rectifying behavior and great photoelectric effect.",
keywords = "Al-doped ZnO (AZO), Current-voltage (I-V) characteristics, ITO, SIS heterojunction, Sputtering",
author = "Bo He and Zhong, \{Quan Ma\} and Jing Xu and Fei Yun and Tang, \{Ying Hui\} and Lei Zhao and Zhang, \{Nan Sheng\} and Feng Li and Cheng Shen and Ling Shen and Meng, \{Xia Jie\} and Zhou, \{Chengy Yue\} and Yu, \{Zheng Shan\} and Yin, \{Yan Ting\}",
year = "2009",
doi = "10.1109/PVSC.2009.5411303",
language = "English (US)",
isbn = "9781424429509",
series = "Conference Record of the IEEE Photovoltaic Specialists Conference",
pages = "2409--2411",
booktitle = "2009 34th IEEE Photovoltaic Specialists Conference, PVSC 2009",
note = "2009 34th IEEE Photovoltaic Specialists Conference, PVSC 2009 ; Conference date: 07-06-2009 Through 12-06-2009",
}