Fabrication and characterization of C implantation standards for Si_1-x-yGe_xC_y alloys

Keyphrases

• Germanium 100%
• Relative Sensitivity Factor 66%
• High-resolution Electron Microscopy 33%
• Secondary Ion Mass Spectrometry 33%
• Rutherford Backscattering Spectrometry 33%
• Germanium Content 33%
• Carbon Implantation 33%
• Quantification Standards 33%
• Silicon Alloy 33%

Material Science

• Alloy 100%
• Germanium 100%
• Silicon 25%
• Secondary Ion Mass Spectrometry 25%
• Film 25%
• High-Resolution Transmission Electron Microscopy 25%
• Silicon Alloys 25%