Abstract
Relative humidity (RH) was measured with ZnO based film bulk acoustic-wave resonator (FBAR). The resonant frequency of the FBAR decreased linearly in a two-stage manner as the RH increased in the environment. For low RH (RH < 50%), a frequency downshift of 2.2 kHz per 1% RH change was observed. For high RH (RH > 50%), a frequency downshift of 8.5 kHz per 1% RH change was obtained. It was demonstrated that the two-stage response of the FBAR can be interpreted using the power law theory for semiconductor gas sensors and the mass loading effect.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 381-384 |
| Number of pages | 4 |
| Journal | Sensors and Actuators, B: Chemical |
| Volume | 147 |
| Issue number | 2 |
| DOIs | |
| State | Published - Jun 3 2010 |
Keywords
- Film bulk acoustic-wave resonator
- Mass loading
- Power law
- Relative humidity
- ZnO
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Instrumentation
- Condensed Matter Physics
- Surfaces, Coatings and Films
- Metals and Alloys
- Electrical and Electronic Engineering
- Materials Chemistry