@inproceedings{d54274dd30d64fe19b60fa2f9c79afad,
title = "Emulation of Plasma Load Reactances by Saturation Control of Low-Permeability Inductors",
abstract = "Power amplifiers and tunable matching networks for plasma generation systems are being continuously advanced, and recent innovations have shown tremendous improvements in their size, efficiency, and capability. These improvements must ultimately be validated on a live plasma chamber, but this is costly and time-consuming, and debugging errors or failures is a challenge owing to the highly dynamic nature of the plasma and the experimental prototype nature of the advancements. This work addresses this challenge by developing a reactive load emulation system that can mimic the inductive reactance of a live plasma chamber. This includes a study of the saturation characteristics of low-permeability, high-frequency materials, demonstration of the suitability of this method for plasma emulation, and the design of an inductor array platform which verifies the approach.",
keywords = "high frequency, low-permeability, magnetics, Plasma emulation, saturation control, variable inductor",
author = "Darshan Tagare and Sanghyeon Park and Ranjram, {Mike K.}",
note = "Publisher Copyright: {\textcopyright} 2024 IEEE.; 39th Annual IEEE Applied Power Electronics Conference and Exposition, APEC 2024 ; Conference date: 25-02-2024 Through 29-02-2024",
year = "2024",
doi = "10.1109/APEC48139.2024.10509427",
language = "English (US)",
series = "Conference Proceedings - IEEE Applied Power Electronics Conference and Exposition - APEC",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "416--423",
booktitle = "2024 IEEE Applied Power Electronics Conference and Exposition, APEC 2024",
}