Electrically tunable and temperature compensated FBAR

Wei Pang, Hongyu Yu, Hao Zhang, Eun Sok Kim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

12 Scopus citations


This paper describes the design, fabrication and measurement of an electrically tunable, temperature compensated film bulk acoustic resonator (FBAR) that is formed by integrating FBAR with an electrostatic MEMS actuator. About 0.9% tuning (Δf ≅26 MHz) of the series resonant frequency at 2.8 GHz has been obtained with less than 10 V. This is the highest frequency tuning reported for FBAR operating above 1GHz without any extra power consumption. Moreover, the air-gap capacitor (that forms the MEMS actuator) passively reduces the FBAR's temperature coefficient of frequency (TCF) by about 40 ppm/°C.

Original languageEnglish (US)
Title of host publication2005 IEEE MTT-S International Microwave Symposium Digest
Number of pages4
StatePublished - 2005
Externally publishedYes
Event2005 IEEE MTT-S International Microwave Symposium - Long Beach, CA, United States
Duration: Jun 12 2005Jun 17 2005

Publication series

NameIEEE MTT-S International Microwave Symposium Digest
ISSN (Print)0149-645X


Other2005 IEEE MTT-S International Microwave Symposium
Country/TerritoryUnited States
CityLong Beach, CA


  • Electrical tuning
  • FBAR
  • Surface micromachined tunable capacitor
  • Temperature compensation

ASJC Scopus subject areas

  • Radiation
  • Condensed Matter Physics
  • Electrical and Electronic Engineering


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