@inproceedings{2563db2ae18249a4bedbf7321982e16b,
title = "EFFECT OF TRANSIENT ANNEALING ON GRAIN GROWTH AND STRUCTURE OF POLYCRYSTALLINE SILICON FILMS.",
abstract = "Transient annealing effects on the grain size, structure and morphology of B and As implanted films of polycrystalline silicon were determined by transmission electron microscopy. Originally, grains had a bimodal distribution of smaller equiaxed grains and larger columnar grains. The growth of both types of grains was described with a modified model for interfacial energy driven grain growth. Bend contours in annealed unimplanted films were not present in annealed ion implanted films due to formation of a cellular network structure in the grains.",
author = "Stephen Krause and Wilson, {S. R.} and Paulson, {W. M.} and Gregory, {R. B.}",
year = "1985",
month = dec,
day = "1",
language = "English (US)",
isbn = "0854981675",
series = "Institute of Physics Conference Series",
number = "76",
pages = "105--110",
booktitle = "Institute of Physics Conference Series",
edition = "76",
}