ECS Transactions: Preface

C. L. Claeys, H. Iwai, M. Tao, J. Murota, J. J. Liou, S. Deleonibus

Research output: Contribution to journalEditorialpeer-review

Original languageEnglish (US)
Pages (from-to)iii
JournalECS Transactions
Volume11
Issue number6
StatePublished - 2007
Externally publishedYes
Event5th International Symposium on ULSI Process Integration - 212th ECS Meeting - Washington, DC, United States
Duration: Oct 7 2007Oct 12 2007

ASJC Scopus subject areas

  • General Engineering

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