ECS Transactions: Preface

Research output: Contribution to journal › Editorial › peer-review

Original language	English (US)
Pages (from-to)	iii
Journal	ECS Transactions
Volume	25
Issue number	7
State	Published - 2009
Externally published	Yes
Event	ULSI Process Integration 6 - 216th Meeting of the Electrochemical Society - Vienna, Austria Duration: Oct 4 2009 → Oct 9 2009

ASJC Scopus subject areas

@article{2593a91113364591a58d536df48a7270,

title = "ECS Transactions: Preface",

author = "Claeys, \{C. L.\} and H. Iwai and M. Tao and J. Murota and S. Deleonibus",

year = "2009",

language = "English (US)",

volume = "25",

pages = "iii",

journal = "ECS Transactions",

issn = "1938-5862",

publisher = "Electrochemical Society, Inc.",

number = "7",

note = "ULSI Process Integration 6 - 216th Meeting of the Electrochemical Society ; Conference date: 04-10-2009 Through 09-10-2009",

}

TY - JOUR

T1 - ECS Transactions

T2 - ULSI Process Integration 6 - 216th Meeting of the Electrochemical Society

AU - Claeys, C. L.

AU - Iwai, H.

AU - Tao, M.

AU - Murota, J.

AU - Deleonibus, S.

PY - 2009

Y1 - 2009

UR - https://www.scopus.com/pages/publications/74349115456

UR - https://www.scopus.com/pages/publications/74349115456#tab=citedBy

M3 - Editorial

AN - SCOPUS:74349115456

SN - 1938-5862

VL - 25

SP - iii

JO - ECS Transactions

JF - ECS Transactions

IS - 7

Y2 - 4 October 2009 through 9 October 2009

ER -