ECS Transactions: Preface

C. Claeys, H. Iwai, M. Tao, J. Murota, S. Deleonibus

Research output: Contribution to journal › Editorial › peer-review

Original language	English (US)
Pages (from-to)	iii
Journal	ECS Transactions
Volume	41
Issue number	7
State	Published - 2011
Externally published	Yes
Event	7th Symposium on ULSI Process Integration - 220th ECS Meeting - Boston, MA, United States Duration: Oct 9 2011 → Oct 14 2011

ASJC Scopus subject areas

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title = "ECS Transactions: Preface",

author = "C. Claeys and H. Iwai and M. Tao and J. Murota and S. Deleonibus",

year = "2011",

language = "English (US)",

volume = "41",

pages = "iii",

journal = "ECS Transactions",

issn = "1938-5862",

publisher = "Electrochemical Society, Inc.",

number = "7",

note = "7th Symposium on ULSI Process Integration - 220th ECS Meeting ; Conference date: 09-10-2011 Through 14-10-2011",

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AU - Claeys, C.

AU - Iwai, H.

AU - Tao, M.

AU - Murota, J.

AU - Deleonibus, S.

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Y2 - 9 October 2011 through 14 October 2011

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