48 Scopus citations


Discrete-event simulation is a well-established and rather successful method in some semiconductor companies, while other companies do not use simulation at all. Simulation is used for performance assessment and decision-making. This paper focuses on the methodological and practical issues that have to be addressed to build, use, and maintain simulation models for a semiconductor wafer fabrication facility (wafer fab). We describe and discuss the main steps of a simulation study in this domain. We seek to highlight the main issues and present alternative ways to address them. Common pitfalls in using discrete-event simulation in semiconductor manufacturing and how they can be avoided are also discussed.

Original languageEnglish (US)
Pages (from-to)661-682
Number of pages22
JournalInternational Journal of Industrial Engineering : Theory Applications and Practice
Issue number5
StatePublished - 2015


  • Discrete-event simulation
  • Modeling issues
  • Semiconductor manufacturing
  • Tutorial

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering


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