Designing a field service system for semiconductor manufacturing systems for remote diagnostics era

Cem Vardar; John Fowler; Esma Gel

Designing a field service system for semiconductor manufacturing systems for remote diagnostics era

Cem Vardar, John Fowler, Esma Gel

Industrial, Systems and Operations Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

With the advances in information technologies, service activities for expensive equipment used in semiconductor manufacturing can be performed from a remote location. This technology is called remote diagnostics (RD). In this study we develop a queueing-location model to analyze the capacity and location problem of after sales service providers considering the effects of RD technology. We also present a case study from semiconductor industry.

Original language	English (US)
Title of host publication	IIE Annual Conference and Exhibition 2004
Pages	1977-1982
Number of pages	6
State	Published - 2004
Event	IIE Annual Conference and Exhibition 2004 - Houston, TX, United States Duration: May 15 2004 → May 19 2004

Other

Other	IIE Annual Conference and Exhibition 2004
Country/Territory	United States
City	Houston, TX
Period	5/15/04 → 5/19/04

ASJC Scopus subject areas

Engineering(all)

Cite this

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title = "Designing a field service system for semiconductor manufacturing systems for remote diagnostics era",

abstract = "With the advances in information technologies, service activities for expensive equipment used in semiconductor manufacturing can be performed from a remote location. This technology is called remote diagnostics (RD). In this study we develop a queueing-location model to analyze the capacity and location problem of after sales service providers considering the effects of RD technology. We also present a case study from semiconductor industry.",

author = "Cem Vardar and John Fowler and Esma Gel",

year = "2004",

language = "English (US)",

pages = "1977--1982",

booktitle = "IIE Annual Conference and Exhibition 2004",

note = "IIE Annual Conference and Exhibition 2004 ; Conference date: 15-05-2004 Through 19-05-2004",

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TY - GEN

T1 - Designing a field service system for semiconductor manufacturing systems for remote diagnostics era

AU - Vardar, Cem

AU - Fowler, John

AU - Gel, Esma

PY - 2004

Y1 - 2004

N2 - With the advances in information technologies, service activities for expensive equipment used in semiconductor manufacturing can be performed from a remote location. This technology is called remote diagnostics (RD). In this study we develop a queueing-location model to analyze the capacity and location problem of after sales service providers considering the effects of RD technology. We also present a case study from semiconductor industry.

AB - With the advances in information technologies, service activities for expensive equipment used in semiconductor manufacturing can be performed from a remote location. This technology is called remote diagnostics (RD). In this study we develop a queueing-location model to analyze the capacity and location problem of after sales service providers considering the effects of RD technology. We also present a case study from semiconductor industry.

UR - http://www.scopus.com/inward/record.url?scp=30044440199&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=30044440199&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:30044440199

SP - 1977

EP - 1982

BT - IIE Annual Conference and Exhibition 2004

T2 - IIE Annual Conference and Exhibition 2004

Y2 - 15 May 2004 through 19 May 2004

ER -

Designing a field service system for semiconductor manufacturing systems for remote diagnostics era

Abstract

Other

ASJC Scopus subject areas

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